®
The MEMS Equipment Company™
 


XACTIX, Inc.
2403 SIDNEY STREET
SUITE 300
PITTSBURGH, PA 15203
USA

TEL: (412) 381-3195
FAX: (412) 381-1136

US Sales:
ussales@xactix.com

International Sales:
intsales@xactix.com

Support:
support@xactix.com

©1998-2009 XACTIX, Inc.
All rights reserved.
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The Xetch e1 Series™


The Xetch e1 TM is a simple, low cost xenon difluoride silicon etch system for universities who do not need all of the features of XACTIX’s X3 Series Xetch® . It is ideal for users who have a limited budget, are part of a smaller group and who are working primarily with small samples and also need to the ability to etch wafers.

Key Features

  • Reliability: The Xetch e1 Series is built to require minimal maintenance.
  • Safety: The e1 has multiple safety interlocks and ventilation provisions for maximum safety.
  • Flexibitlity: The process chamber can accommodate individual die, pieces of wafer, wafers of any size up to 6” or even packaged chips.
  • Sophisticated Control: The e1's control software manages recipes, logs data and manages multiple users.
  • Cost of Ownership: A small footprint, easy utilities and robust design keep the cost of ownership low.

    Last Updated August 3, 2005