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The
Xetch e1 Series™
The
Xetch e1 TM is a simple, low cost xenon difluoride silicon
etch
system for universities who do not need all of the features of
XACTIX’s
X3 Series Xetch® . It is ideal for users who have a limited
budget, are part of a
smaller group and who are working primarily with small samples
and also
need to the ability to etch wafers.
Key
Features
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