Xetch
XT™ Specifications
Patent
pending
Overview
The
Xetch XT is designed to support larger chambers while maintaining
etch pressures and gas distribution. It is ideal for etching
on glass sheets or for processing large trays of parts such as
packages.
Key
Features:
- Easily
configured chamber to support larger substrates or trays
of parts.
- Configurable
gas delivery system for different size chambers.
- Unique
showerhead and gas distribution system to manage uniformity
of etch.
- Units
can be optionally configured to be clustered around an
atmospheric robot.
- Manual
loading configuration includes a built-in fume hood to
protect operator during loading and unloading.
- Gas
box and chamber temperature control for superior repeatibility.
- Patened
gas delivery system for higher etch rate.
System
Geometry
The
Xetch® XT is delivered in its standard configuration
with two xenon difluoride expansion chambers and the
provision for
the
installation of two xenon difluoride source bottles
(not included with the system).
Wafer Capacity
The
XT can accomodate substrates up to 370 mm
x 470 mm or trays of parts up to 370 mm x 470 mm x 30 mm. Processing
or larger substrates and trays available with optional chambers.
Software
Control
The
unit comes ready to use with a friendly software interface
controlled
from a touch screen display.
Ethernet
Control Upgrade
The
Xetch can be upgraded to be monitored and/or controlled from
a remote computer hooked up through an ethernet network.
Utility
requirements
- 100-120
Volt AC/ 20 Amps for system excluding vacuum pump, which requires
10A
- Nitrogen
lines for process N2, vent N2, and gas box purge N2: 10-20
psi
- Compressed
Dry Air: 70-100 psi
- Fume
exhaust from roughing pump, gas box, and chamber ventilation
shroud
Dimensions
and Weight
- System
Frame: 120cm wide X 100cm deep X 190cm high
- Weight
approximately 700 lbs
Warranty
and installation
- 1-year
parts and labor
- Free
software updates for one year from acceptance.
- Installation
is included in the system price
- Installation
takes 1 day, and 1 further day for operator training is also
included in the system price.
- Final
verification test at the customer’s site
Last
Updated Sept 11, 2006
